Introduction to Microsystem Technology
A Guide for Students Gerald Gerlach, Wolfram Dotzel ... Miniaturization and integration have thus opened up a new technical field which has many names. ... presented his article a#39;Silicon as a mechanical materiala#39;2 and was the first to describe the entire potential of microsystem technology. ... 1Portion of text is reproduced by permission of The American Introduction to Microsystem Technology: Preface.
| Title | : | Introduction to Microsystem Technology |
| Author | : | Gerald Gerlach, Wolfram Dotzel |
| Publisher | : | John Wiley & Sons - 2008-04-30 |
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